第241章 MPCVD(2 / 2)

陈舟和沈靖再次对视一眼,沈靖给陈舟递了个眼神,交给你了,我不懂这些……

而陈舟只觉得纳闷,怎么这师徒两人,都喜欢问人问题呢?

偏偏还都是这么简单的问题,要问也问点有难度的呀?

想是这样想,陈舟肯定不会说出来,万一这高冷学姐……

收回思绪,陈舟轻声说道:“普通半导体材料受到自身性能的约束,在高温条件下的应用会受到极大的限制。”

“而金刚石半导体器件具有高载流子迁移率、高热导率和低介电常数等优异的电学性质,能够在高频、大功率和高温高压等十分恶劣的环境中运行。”

“金刚石通过掺杂可呈现n型导电和p型导电,性能会远超砷化镓、氮化镓和碳化硅等材料,是目前最有希望的宽禁带高温半导体材料。”

潘诗妍略显意外的看了陈舟一眼,没想到这人知道的还不少。

“没错。但不光如此,”潘诗妍补充道,“由于金刚石带隙很宽,在半导体领域中,既能作为有源器件材料,像场效应管和功率开关,也能作为像肖特基二极管这样的无源器件材料。”

顿了顿,她看着陈舟又问道:“你刚才说金刚石是一种宽禁带高温半导体材料,怎么看出来的?”

陈舟看了潘诗妍一眼,想了想,既然你打开了话题,那我就不客气了。

陈舟便说道:“金刚石的带隙宽度是5.5eV,它的高载流子迁移率在4500cm/(V·s),空穴为3800cm/(V·s),高热导率在22W/(cm·K),高击穿电场在10MV/cm。”

“而其电子载流子饱和速率在1.5×10^7到2.7×10^7cm/s之间,空穴载流子饱和速率在0.85×10^7到1.2×10^7cm/s之间,低介电常数是5.7。”

“基于这些优异的性能参数,金刚石被认为是制备下一代高功率、高频、高温及低功损耗率电子器件最有希望的材料。”

说完这些,陈舟停顿了一下,又继续说道:“虽然金刚石的储量非常稀少,但是上世纪50年代,人们便已经用石墨合成了人造金刚石。”

“而且人造金刚石和天然金刚石的结构相同、性能相近,也就很好的解决了金刚石来源的问题。”

“此外,上世纪80年代,通过建立热丝化学气相沉积装置,也就是HFCVD法,已经能够在非金刚石衬底上制备金刚石薄膜。到了90年代中期,金刚石膜沉积理论已经相对完善了。”

“虽然后来在20世纪末到21世纪初的时候,受到制备方法的制约,金刚石膜的研究不太顺利,但随着重复生长法、三维生长法及马赛克法的出现,促进了大尺寸金刚石制备的发展。”

随着陈舟的叙述的声音,他身旁的沈靖已经目瞪口呆了。

好家伙,你真的是我们数学专业的吗?

不是,你真的是我们物理和数学专业的吗?

这怎么化学方法都这么熟悉?

当然,更令沈靖惊讶的是,这些内容,他怎么没在文献上看到?

不管是四十三所发的课题资料,还是陈舟给他发的课题资料,都没有……

除了沈靖外,原本正在做实验的研究员们也是一脸惊讶的回头看着陈舟。

你们不是说找的是燕大数学系的人来帮忙吗?

我怎么看这像是化学系的?

而问问题的潘诗妍,也同样被陈舟这流利的叙述给惊到了。

原本想着给两个新人上上课的她,却没想到被陈舟给重新上了一遍课。

陈舟看了众人一眼,缓缓将目光落在实验装置上,轻声说道:“你们采用的制备金刚石薄膜的方法,应该是微波等离子体化学气相沉积装置,也就是MPCVD法。”

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